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In 2011, the maximum allowable emission rate will be 10%, stepping down one percent each year until 2020 when there will be a 1% maximum allowable emission rate. Emission rates wil...
SF6 gas is pumped using an oil-less compressor system to prevent oil contamination of the gas. Gas liquefaction is achieved b
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service (e.g., Oxygen or Nitrous Oxide) must be cleaned for oxidizer service. ... Sulfur Hexafluoride SF6 SSSS I SSSSSSS IC3S
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This chart gives the thermal conductivity of gases as a function of temperature. Unless otherwise noted, the values refer to a pressure of 100 kPa (1 bar) or to the saturation vapo...
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PFC, HFC, NF3 and SF6 Emissions from Semiconductor Manufacturing 245 1 INTRODUCTION 1.1 Nature, magnitude, and distribution of source Semiconductors or integrated circuits act as t...
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